Excimer laser lithography /
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE Optical Engineering Press,
c1990
|
| Series: | SPIE monograph ;
3 |
| Subjects: | |
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| 100 | 1 | |a Jain, Kanti, |d 1948- | |
| 245 | 1 | 0 | |a Excimer laser lithography / |c Kanti Jain |
| 260 | |a Bellingham, Wash., USA : |b SPIE Optical Engineering Press, |c c1990 | ||
| 300 | |a x, 212 p. : |b ill. ; |c 27 cm | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a unmediated |b n |2 rdamedia | ||
| 338 | |a volume |b nc |2 rdacarrier | ||
| 490 | 1 | |a SPIE Press monograph ; |v PM03 | |
| 504 | |a Includes bibliographical references (p. 193-207) and index | ||
| 504 | |a Includes bibliographical references | ||
| 599 | |a GRSN 406630 | ||
| 650 | 0 | |a Excimer lasers |x Industrial applications |0 https://id.loc.gov/authorities/subjects/sh00006117 | |
| 650 | 0 | |a Excimer lasers |x Industrial applications | |
| 650 | 0 | |a Microlithography | |
| 650 | 7 | |a Excimer lasers |2 fast | |
| 650 | 7 | |a Excimer lasers |x Industrial applications |2 fast | |
| 650 | 7 | |a Microlithography |2 fast | |
| 830 | 0 | |a SPIE monograph ; |v 3 | |
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