Miniaturized systems with micro-optics and micromechanics : 30-31 January 1996, San Jose, California /
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| Corporate Authors: | , , |
|---|---|
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| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
[1996], ©1996
Bellingham, Wash., USA : c1996 |
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 2687 |
| Subjects: | |
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| 092 | |a 621.36 |b P963, S755x, v. 2687 | ||
| 245 | 0 | 0 | |a Miniaturized systems with micro-optics and micromechanics : |b 30-31 January 1996, San Jose, California / |c M. Edward Motamedi, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization ARPA--Advanced Research Projects Agency |
| 260 | |a Bellingham, Wash., USA : |b SPIE, |c [1996], ©1996 | ||
| 260 | |a Bellingham, Wash., USA : |b SPIE, |c c1996 | ||
| 300 | |a vii, 168 p. : |b ill. ; |c 28 cm | ||
| 300 | |a vii, 168 pages : |b illustrations ; |c 28 cm | ||
| 336 | |a text |2 rdacontent | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a unmediated |2 rdamedia | ||
| 337 | |a unmediated |b n |2 rdamedia | ||
| 338 | |a volume |2 rdacarrier | ||
| 338 | |a volume |b nc |2 rdacarrier | ||
| 490 | 1 | |a SPIE proceedings series ; |v v. 2687 | |
| 504 | |a Includes bibliographical references and index | ||
| 505 | 0 | 0 | |t Recent achievements on MOEM systems at Micromachine Center (MMC) / |r R. Ohta -- |t Micromirror arrays for active optical aberration control / |r S. C. Gustafson, T. A. Tuthill and E. A. Watson -- |t Fabrication of microlenses by combining silicon technology, mechanical micromachining and plastic molding / |r U. Kohler, A. E. Guber, W. Bier, M. Heckele and Th. Schaller -- |t Miniaturized optical switches based on piezoelectrically driven microprism arrays / |r R. Goring, S. Glockner and F. Bohrisch -- |t Realizing micro-opto-electro-mechanical devices through a commercial surface-micromachining process / |r V. M. Bright, J. H. Comtois, D. E. Sene, J. R. Reid, S. C. Gustafson and E. A. Watson -- |t Magnetically actuated MEMS scanning mirror / |r R. A. Miller, G. W. Burr, Y.-C. Tai and D. Psaltis -- |t Actuation of polysilicon surface-micromachined mirrors / |r N. C. Tien, M.-H. Kiang, M. J. Daneman, O. Solgaard, K. Y. Lau and R. S. Muller -- |
| 505 | 8 | 0 | |t Analysis of optical beam steering using phased micromirror arrays / |r E. A. Watson and A. R. Miller -- |t FPAs and thin film binary optic microlens integration / |r M. E. Motamedi, W. E. Tennant, R. Melendes, N. S. Gluck, S. Park, J. M. Arias, J. Bajaj, J. G. Pasko, W. V. McLevige, M. Zandian, R. Hall, K. G. Steckbauer, P. D. Richardson and D. E. Cooper -- |t Optical network of silicon micromachined sensors / |r M. L. Wilson, D. W. Burns and J. D. Zook -- |t Microjet printing of anamorphic microlens arrays / |r W. R. Cox, T. Chen, D. W. Ussery, D. J. Hayes, R. F. Hoenigman, D. L. MacFarlane and E. Rabinovich -- |t Design and fabrication issues in the development of monolithic micro-optical systems / |r C. M. Egert and S. Rajic -- |t Micro-size ball lenses for micro-optics: theory and experiment / |r L. Yang, K. W. Chang, G. R. Trott, R. P. Ratowsky, R. J. Deri and J. S. Kallman -- |t Monolithically integrated refractive microlens standing perpendicular to the substrate / |r C. R. King, L.-Y. Lin and M. C. Wu -- |
| 505 | 8 | 0 | |t Planar gradient-index cylindrical microlenses: flexible components for laser diode applications / |r R. Goring, T. Possner and P. Schreiber -- |t Novel method for making parabolic grating / |r B. Chen, L. Guo, J. Tang, P. Xu and M. Zhou -- |t Fabrication of microlens arrays by reactive ion milling / |r H. O. Sankur, R. L. Hall, M. E. Motamedi, W. J. Gunning and W. E. Tennant -- |t Aspherization of cylindrical lenses by laser irradiation / |r V. P. Veiko, A. T. Shakola, E. B. Jakovlev and E. A. Shahno |
| 650 | 0 | |a Integrated optics |v Congresses | |
| 650 | 0 | |a Integrated optics |x Congresses | |
| 650 | 0 | |a Micromechanics |v Congresses | |
| 650 | 0 | |a Micromechanics |x Congresses | |
| 650 | 0 | |a Miniature electronic equipment |v Congresses | |
| 650 | 0 | |a Miniature electronic equipment |x Congresses | |
| 650 | 0 | |a Optical scanners |v Congresses | |
| 650 | 0 | |a Optical scanners |x Congresses | |
| 650 | 7 | |a Integrated optics |2 fast | |
| 650 | 7 | |a Micromechanics |2 fast | |
| 650 | 7 | |a Miniature electronic equipment |2 fast | |
| 650 | 7 | |a Optical scanners |2 fast | |
| 655 | 7 | |a Conference papers and proceedings |2 fast | |
| 700 | 1 | |a Motamedi, M. Edward | |
| 710 | 1 | |a United States |b Advanced Research Projects Agency. | |
| 710 | 2 | |a Society of Photo-Optical Instrumentation Engineers | |
| 710 | 2 | |a Society of Photo-optical Instrumentation Engineers | |
| 830 | 0 | |a Proceedings of SPIE--the International Society for Optical Engineering ; |v v. 2687 | |
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