Wafer fabrication : factory performance and analysis /

Understanding the details of wafer fabrication processes and the related aspects of electronic devices can be an overwhelming task in the absence of a systematic, comprehensive view of the technology. Wafer Fabrication: Performance and Analysis provides this perspective. The book presents a complete...

Full description

Saved in:

Bibliographic Details
Main Author:	Atherton, Linda F
Other Authors:	Atherton, Robert W
Format:	Book
Language:	English
Published:	Boston : Kluwer Academic Publishers, c1995 Boston : [1995]
Series:	Kluwer international series in engineering and computer science ; SECS 339 Kluwer international series in engineering and computer science Microelectronics manufacturing Kluwer international series in engineering and computer science Microelectronics manufacturing. Kluwer international series in engineering and computer science SECS 339
Subjects:	Factory management Semicondictor wafers > Design and construction > UNAUTHORIZED Semiconductor wafers > Design and construction Semiconductor wafers
Tags:	Add Tag No Tags, Be the first to tag this record!

Internet

Stanford University

Holdings details from Stanford University
Call Number:	TK7871.85 .A844 1995

Massachusetts Institute of Technology

Holdings details from Massachusetts Institute of Technology
Call Number:	TK7871.85.A844 1995

Duke University

Holdings details from Duke University
Call Number:	TK7871.85 .A844 1995

Cornell University

Holdings details from Cornell University
Call Number:	TK7871.85 .A844x 1995

University of Pennsylvania

Holdings details from University of Pennsylvania
Call Number:	TK7871.85 .A844 1995