Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA

Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA

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Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers (Content Provider), Sandia National Laboratories (Content Provider), Semiconductor Equipment and Materials International (Content Provider), Society of Photo Optical Instrumentation Engineers (Content Provider), Solid State Technology (Organization) (Content Provider)
Other Authors: Karam, Jean-Michel (Contributor), Yasaitis, John (Contributor)
Format: Book
Language:English
Published: [Place of publication not identified] SPIE 2000
Series:SPIE proceedings series Micromachining and microfabrication process technology VI
Subjects:
Electromechanical devices > Congresses
Microfabrication > Congresses
Micromachining > Design and construction > Congresses
Engineering & Applied Sciences
Mechanical Engineering - General
Mechanical Engineering
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