Micromachining and microfabrication process technology XV : 26 January 2010, San Francisco, California, United States

Micromachining and microfabrication process technology XV : 26 January 2010, San Francisco, California, United States

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Bibliographic Details
Corporate Author: SPIE (Society) (Content Provider)
Other Authors: Chiao, Jung-Chih (Contributor), Perez-Maher, Mary Ann (Contributor), Resnick, Paul J (Contributor)
Format: Book
Language:English
Published: [Place of publication not identified] SPIE 2010
Series:Proceedings of SPIE Micromachining and microfabrication process technology XV
Subjects:
Electromechanical devices > Congresses
Microfabrication > Design and construction > Congresses
Micromachining > Design and construction > Congresses
Miniature electronic equipment > Congresses
Engineering & Applied Sciences
Mechanical Engineering - General
Mechanical Engineering
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