Micromachining and microfabrication process technology XV : 26 January 2010, San Francisco, California, United States
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| Format: | Book |
| Language: | English |
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SPIE
2010
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| Series: | Proceedings of SPIE Micromachining and microfabrication process technology XV
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| 245 | 0 | 0 | |a Micromachining and microfabrication process technology XV : 26 January 2010, San Francisco, California, United States |
| 264 | 3 | 1 | |a [Place of publication not identified] |b SPIE |c 2010 |
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| 650 | 0 | |a Electromechanical devices |v Congresses | |
| 650 | 0 | |a Microfabrication |x Design and construction |v Congresses | |
| 650 | 0 | |a Micromachining |x Design and construction |v Congresses | |
| 650 | 0 | |a Miniature electronic equipment |v Congresses | |
| 650 | 7 | |a Engineering & Applied Sciences |2 HILCC | |
| 650 | 7 | |a Mechanical Engineering - General |2 HILCC | |
| 650 | 7 | |a Mechanical Engineering |2 HILCC | |
| 700 | |a Chiao, Jung-Chih |e Contributor | ||
| 700 | |a Perez-Maher, Mary Ann |e Contributor | ||
| 700 | |a Resnick, Paul J |e Contributor | ||
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