Micromachining and microfabrication process technology XV : 26 January 2010, San Francisco, California, United States
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Format: | Book |
Language: | English |
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SPIE
2010
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Series: | Proceedings of SPIE Micromachining and microfabrication process technology XV
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650 | 0 | |a Electromechanical devices |v Congresses | |
650 | 0 | |a Microfabrication |x Design and construction |v Congresses | |
650 | 0 | |a Micromachining |x Design and construction |v Congresses | |
650 | 0 | |a Miniature electronic equipment |v Congresses | |
650 | 7 | |a Engineering & Applied Sciences |2 HILCC | |
650 | 7 | |a Mechanical Engineering - General |2 HILCC | |
650 | 7 | |a Mechanical Engineering |2 HILCC | |
700 | |a Chiao, Jung-Chih |e Contributor | ||
700 | |a Perez-Maher, Mary Ann |e Contributor | ||
700 | |a Resnick, Paul J |e Contributor | ||
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