Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA /

Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA /

Show other versions (2)

Saved in:

Bibliographic Details
Corporate Authors:	Sandia National Laboratories, Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization)
Other Authors:	Karam, Jean-Michel, Yasaitis, John
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, c2000
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4174
Subjects:	Electromechanical devices > Design and construction > Congresses Microfabrication > Congresses Micromachining > Congresses Electromechanical devices Electromechanical devices > Design and construction Microfabrication Micromachining Conference papers and proceedings
Tags:	Add Tag No Tags, Be the first to tag this record!

Internet

This item is not available through BorrowDirect. Please contact your institution’s interlibrary loan office for further assistance.

Massachusetts Institute of Technology

Holdings details from Massachusetts Institute of Technology
Call Number:	QC176.8.M5.M526 2000