Fundamental principles of engineering nanometrology /

The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. The establishment of common standards will be an essentia...

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Bibliographic Details
Main Author: Leach, R. K
Format: Book
Language:English
Published: Oxford : Amsterdam : William Andrew ; Elsevier Science, ©2010
Oxford : William Andrew : Elsevier Science, 2010
Edition:1st ed
Series:Micro nano technologies
Micro & nano technologies
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Stanford University

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