Micro and nano fabrication technology /
This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and ad...
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| Format: | Book |
| Language: | English |
| Published: |
Singapore :
Springer,
2018
Singapore : [2018] |
| Series: | Micro/nano technologies ;
1 Micro/nano technologies, |
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