Industrial micro & nano fabrication
This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industr...
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| Format: | Electronic Book |
| Language: | English |
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Norwich, N.Y. : Oxford :
William Andrew ; Elsevier Science [distributor],
2010
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| Series: | Micro & nano technologies
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