Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France /

Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France /

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Bibliographic Details
Corporate Authors:	Association nationale de la recherche technique, European Federation for Applied Optics, European Physical Society, Society of Photo-Optical Instrumentation Engineers, Society of Photo-optical Instrumentation Engineers, European Congress on Optics
Other Authors:	Lacombat, Michel J, Wittekoek, Steve
Format:	Conference Proceeding Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1989], ©1989 Bellingham, Wash., USA : c1989
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1138
Subjects:	Integrated circuits > Design and construction > Congresses Microlithography > Congresses
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Duke University

Holdings details from Duke University
Call Number:	TK7874 .O67 1989

Columbia University

Holdings details from Columbia University
Call Number:	TR940 .O698 1989g