Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France /
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| Corporate Authors: | , , , , , |
|---|---|
| Other Authors: | , |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
[1989], ©1989
Bellingham, Wash., USA : c1989 |
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 1138 |
| Subjects: | |
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| 245 | 0 | 0 | |a Optical microlithography and metrology for microcircuit fabrication : |b 27-28 April 1989, Paris, France / |c Michel J. Lacombat, Steve Wittekoek, chairs/editors, the Congress of EPS--European Physical Society, Europtica--the European Federation for Applied Optics, SPIE--the International Society for Optical Engineering ; cooperating organizations, ANRT Association nationale de la recherche technique ... [et al.] |
| 260 | |a Bellingham, Wash., USA : |b SPIE, |c [1989], ©1989 | ||
| 260 | |a Bellingham, Wash., USA : |b SPIE, |c c1989 | ||
| 300 | |a vii, 206 p. : |b ill. ; |c 28 cm | ||
| 300 | |a vii, 206 pages : |b illustrations ; |c 28 cm | ||
| 336 | |a text |2 rdacontent | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a unmediated |2 rdamedia | ||
| 337 | |a unmediated |b n |2 rdamedia | ||
| 338 | |a volume |2 rdacarrier | ||
| 338 | |a volume |b nc |2 rdacarrier | ||
| 490 | 1 | |a SPIE proceedings series ; |v v. 1138 | |
| 500 | |a At head of title: Proceedings / ECO | ||
| 500 | |a "ECO2." | ||
| 504 | |a Includes bibliographical references and index | ||
| 504 | |a Includes bibliographies and index | ||
| 650 | 0 | |a Integrated circuits |x Design and construction |v Congresses | |
| 650 | 0 | |a Microlithography |v Congresses | |
| 700 | 1 | |a Lacombat, Michel J | |
| 700 | 1 | |a Wittekoek, Steve | |
| 710 | 2 | |a Association nationale de la recherche technique | |
| 710 | 2 | |a European Federation for Applied Optics | |
| 710 | 2 | |a European Physical Society | |
| 710 | 2 | |a Society of Photo-Optical Instrumentation Engineers | |
| 710 | 2 | |a Society of Photo-optical Instrumentation Engineers | |
| 711 | 2 | |a European Congress on Optics |n (2nd : |d 1989 : |c Paris, France) | |
| 830 | 0 | |a Proceedings of SPIE--the International Society for Optical Engineering ; |v v. 1138 | |
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