MOEMS and miniaturized systems XIII : 3-6 February 2014, San Francisco, California, United States /

MOEMS and miniaturized systems XIII : 3-6 February 2014, San Francisco, California, United States /

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Bibliographic Details
Corporate Author: SPIE (Society) (sponsoring body)
Other Authors: Wibool Piyawattanametha, 1973- (Editor), Park, Yong-Hwa (Editor)
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2014]
Series:Proceedings of SPIE--the International Society for Optical Engineering v. 8977
Subjects:
Microelectromechanical systems > Congresses
Micromechanics > Congresses
Miniature electronic equipment > Congresses
Optical scanners > Congresses
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Call Number: ISIL:US-CST

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