Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas

Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas

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Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers (Content Provider), National Institute of Standards and Technology (U.S.) (Content Provider), Semiconductor Equipment and Materials International (Content Provider), Society of Photo Optical Instrumentation Engineers (Content Provider)
Other Authors: Chang, Shih-Chia (Contributor), Pang, Stella W (Contributor)
Format: Book
Language:English
Published: [Place of publication not identified] SPIE the International Society of Optical Engineering 1996
Series:Proceedings / SPIE--the International Society of Optical Engineering Micromachining and microfabrication process technology II
Subjects:
Electromechanical devices > Congresses > Design and construction
Microfabrication > Congresses
Micromachining > Congresses
Engineering & Applied Sciences
Mechanical Engineering - General
Mechanical Engineering
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