MOEMS and miniaturized systems IV 27-28 January, 2004, San Jose, California, USA /
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| Format: | Electronic Book |
| Language: | English |
| Published: |
Bellingham, Wash. :
SPIE,
c2004
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering
v. 5346 |
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ISIL:US-CST |
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